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Low-energy current ion source


Ion source application:
optical coatings deposition by ion assisting method;
ion cleaning;
realizing of CVD method for diamond-like coatings deposition;
reaction deposition (production of nitrides, carbides, etc.).


Specification:
voltage40… 120 V
anode current0,5… 5 A
current of thermocathode15… 20 A
current of solenoid200… 600 mA
working pressure8•10-3… 1,5•10-1 Pa
form of ion beamconic
technological gasesargon, oxygen, nitrogen, hydrocarbons
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